Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Joris Sturm"'
Autor:
Victor Deinhart, Lisa-Marie Kern, Jan N. Kirchhof, Sabrina Juergensen, Joris Sturm, Enno Krauss, Thorsten Feichtner, Sviatoslav Kovalchuk, Michael Schneider, Dieter Engel, Bastian Pfau, Bert Hecht, Kirill I. Bolotin, Stephanie Reich, Katja Höflich
Publikováno v:
Beilstein Journal of Nanotechnology, Vol 12, Iss 1, Pp 304-318 (2021)
Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial.
Externí odkaz:
https://doaj.org/article/453fcdf5c0624203b0db4315c367c47e
Autor:
Jan N. Kirchhof, Katja Höflich, Enno Krauss, Michael Schneider, Stephanie Reich, Sviatoslav Kovalchuk, Lisa-Marie Kern, Victor Deinhart, Bert Hecht, Dieter Engel, Thorsten Feichtner, Sabrina Juergensen, Bastian Pfau, Joris Sturm, Kirill I. Bolotin
Publikováno v:
Beilstein Journal of Nanotechnology
Beilstein Journal of Nanotechnology, Vol 12, Iss 1, Pp 304-318 (2021)
Beilstein Journal of Nanotechnology, Vol 12, Iss 1, Pp 304-318 (2021)
Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d6be8483b217d5317becb0e2c0cc0d83
http://www.helmholtz-berlin.de/pubbin/oai_publication?VT=1&ID=105287
http://www.helmholtz-berlin.de/pubbin/oai_publication?VT=1&ID=105287
