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pro vyhledávání: '"Jorg Lubke"'
Autor:
Matthias Schops, Ulrich Horn, Robert Schmaler, Thorsten Schmidt, Christian Hammel, Jorg Lubke, Marcin Mosinski
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Due to higher flexibility demands, smaller lot sizes in production, and tool upgrades leading to higher throughputs existing, Automated Material Handling Systems are facing rising requirements. At the same time, the potential to upgrade transport sys
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::db7a78830105fdb6dbca356c77534432
https://doi.org/10.1109/asmc.2016.7491109
https://doi.org/10.1109/asmc.2016.7491109
