Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Joonho You"'
Publikováno v:
Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1a2d867186bd738410e95105fb9de0ed
https://doi.org/10.3850/978-981-18-6021-8_or-11-0077.html
https://doi.org/10.3850/978-981-18-6021-8_or-11-0077.html
Publikováno v:
Optics express. 27(24)
In this investigation, we propose a technique to obtain not only the dimensional surface profile but also tilt information of the rough dielectric surface having a few microns root-mean-square roughness. This technique is based on low coherence scann
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::45c31ea4cd72258c98eaab4c346a1c2e
https://pubmed.ncbi.nlm.nih.gov/31878762
https://pubmed.ncbi.nlm.nih.gov/31878762
Publikováno v:
CIRP Annals. 66:535-538
Chemically strengthened glass used for smartphones and tablets is cut into elaborate shapes by creating internal cracks using femtosecond laser pulses. The peak power is set at near ionization intensities of ∼1014 W/cm2 to initiate sub-surface crac
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c480aae34eb7797d316844050e06b049
https://doi.org/10.1016/j.cirp.2017.04.071
https://doi.org/10.1016/j.cirp.2017.04.071
Publikováno v:
International Journal of Precision Engineering and Manufacturing. 10:5-10
Surface profiling and film thickness measurement play an important role for inspection in semi conductor industry. White light source had been used as scanning white light interferometry and spectrally resolved white light interferometry for determin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::019e7b3b4982621a2e510c8b723a0d34
https://doi.org/10.1007/s12541-009-0086-0
https://doi.org/10.1007/s12541-009-0086-0
Publikováno v:
CIRP Annals. 58:473-476
We describe an industrial interferometer designed to conduct high-precision surface measurements in the presence of severe vibration. The principle of common-path interferometry is realized by devising a single-mode fiber waveguide that generates the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::776f42789b1279b281e51907e2a0a40f
https://doi.org/10.1016/j.cirp.2009.03.006
https://doi.org/10.1016/j.cirp.2009.03.006
Autor:
A Joonho You, B. Ki-Nam Joo
Publikováno v:
2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR).
We introduce and verify an iterative least squared phase shifting method, inherently insensitive to any types of phase shifting errors, to calculate the spectral phase in PS-SRI. In this presentation, a description of the method and its simulation re
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::184b61b6f7838cab9b496e21b38d6aba
https://doi.org/10.1109/cleopr.2013.6600586
https://doi.org/10.1109/cleopr.2013.6600586
Publikováno v:
SPIE Proceedings.
A high level of immunity to vibration required for on-machine measurements is demonstrated by the continuous phaseshifting interferometer described in this work. Phase measurement errors caused by environmental disturbance and mechanical instability
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9f9419c61bd1a5e0aeda04f481e380bc
https://doi.org/10.1117/12.825793
https://doi.org/10.1117/12.825793
Publikováno v:
SPIE Proceedings.
The principle of angle-resolved reflectometry is exploited for thin-film thickness measurements. Within an optical microscope equipped with a high NA objective, a sequence of quasi-monochromatic light of different wavelengths is generated from a whit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::998da1aa50694710d2a75feb012823cd
https://doi.org/10.1117/12.797523
https://doi.org/10.1117/12.797523
Publikováno v:
SPIE Proceedings.
A dispersive method of white-light interferometry for measuring the tomographical thickness profile of a thin-film layer through a Fourier-transform analysis of a spectrally-resolved interference signal is proposed. The refractive index is also deter
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::65d96d00b47a5774d511dc6c9b7869dd
https://doi.org/10.1117/12.732311
https://doi.org/10.1117/12.732311
Publikováno v:
SPIE Proceedings.
Emerging possibility of applying white-light interferometry to the area of thin-film metrology is addressed. Emphasis is given to explaining underlying spectrally-resolved interferometric principles of white-light interferometry for measuring the top
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0aa1e6b4bb6f1c96daca62758d44e88c
https://doi.org/10.1117/12.726040
https://doi.org/10.1117/12.726040