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pro vyhledávání: '"Joongha Lee"'
Publikováno v:
International Journal of Precision Engineering and Manufacturing-Green Technology. 7:929-938
As the feature size of semiconductor chips is decreasing down to nanometric scales, cleaning of nanoscale contaminant particles without damaging the fine features puts forth severe technological challenges. Here we introduce a design methodology of a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aba0cf2c0f30811e1996bce161bd4b0f
https://doi.org/10.1007/s40684-019-00176-4
https://doi.org/10.1007/s40684-019-00176-4
Autor:
Lee, Jae Hong, Kim, Joonoh, Kim, Seungho, Lee, Joongha, Kim, Jinkyu, Choi, Kihoon, Kim, Ho-Young
Publikováno v:
International Journal of Precision Engineering & Manufacturing-Green Technology; 2020, Vol. 7 Issue 5, p929-938, 10p