Výsledky vyhledávání - "Joo, Jongryang"

Akademický článek

Effects of plasma power on the properties of low-k polymerlike organic thin films deposited by plasma-enhanced chemical vapor deposition using the toluene precursor.

Autor: Joo, Jongryang, Quan, Yong Chun, Jung, Donggeun

Publikováno v: Journal of Materials Research; Jan2000, Vol. 15 Issue 1, p228-230, 3p

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Periodical

Effects of Deposition Pressure on the Properties of a Low-Dielectric Constant Cyclohexane-based Plasma Polymer

Autor: Quan, Yong Chun, Joo, Jongryang, Yeo, Sanghak, Jung, Donggeun

Publikováno v: Japanese Journal of Applied Physics; March 2000, Vol. 39 Issue: 3 p1325-1325, 1p

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Periodical

Polymer-like Organic Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using the Para-xylene Precursor as Low Dielectric Constant Interlayer Dielectrics for Multilevel Metallization

Autor: Chun Quan, Yong, Jongryang Joo, Jongryang Joo, Donggeun Jung, Donggeun Jung

Publikováno v: Japanese Journal of Applied Physics; March 1999, Vol. 38 Issue: 3 p1356-1356, 1p

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