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Publikováno v:
Applied Surface Science. 489:330-335
We demonstrate the passivation improvement of tunnel oxide formed by nitric acid oxidation and followed by ozone post-treatment. A tunnel oxide passivated contacts (TOPCon) structure was fabricated through polysilicon crystallization using POCl3 diff
Autor:
Jong Hoon Baek, Sang Hoon Oh
Publikováno v:
Journal of international area studies. 18:329
Publikováno v:
Journal of the Korean Fracture Society. 27:127
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