Zobrazeno 1 - 10
of 98
pro vyhledávání: '"Jong Ahn Kim"'
Publikováno v:
International Journal of Precision Engineering and Manufacturing.
Publikováno v:
Optical Engineering. 61
Publikováno v:
IEEE Transactions on Instrumentation and Measurement. 69:2225-2231
A multi-axis position sensor using a 2-D color-coded binary scale (CCBS) is proposed for measuring absolute 2-D planar position and orientation in a full angle range. Since a color-encoding method provides higher information density with multiple col
Publikováno v:
International Journal of Precision Engineering and Manufacturing. 20:463-477
Thickness is a typical parameter related to length, of which measurements are conducted in various industrial fields, such as the automotive, aviation, ship-building, semiconductor, and display industries. Among various measurement techniques, optica
Publikováno v:
Optics Communications. 431:181-186
A non-destructive method for measuring the physical thickness and group refractive index of individual layers was proposed based on spectral-domain interferometry, which was realized to achieve real-time measurements using a mode-locked laser and an
Publikováno v:
Measurement. 194:111023
Publikováno v:
Measurement. 118:113-119
An interferometric profile scanning system is proposed to measure straightness of a planar mirror surface. Since surface profiles of reference mirrors used in precision systems, such as a bar mirror of an X-Y stage controlled by a laser interferomete
Publikováno v:
Measurement Science and Technology. 32:105204
Publikováno v:
Journal of Lightwave Technology. 34:5462-5466
To measure the depth and diameter of through silicon vias simultaneously, a novel method based on spectral-domain interferometer and confocal microscope is proposed and realized. Most parts of the measurement system are constructed with optical fiber
Publikováno v:
The Review of scientific instruments. 90(4)
A high-resolution angle sensor which uses a double slit (DS) is proposed. By analyzing the positions of intensity peaks in the DS interference pattern, the incident angle of a collimated beam entering the DS is measured. The DS was designed to genera