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Autor:
Leonard C. Pipes, Matthew Castle, Jonathon Yancey Simmons, T. Marin, Mitchell C. Taylor, Gerard Zietz, Amir Al-Bayati
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 237:330-335
A new particle defect mode has manifested itself with the introduction of sub-0.25 μm process flows. Device structures can now be damaged as a result of collision of high velocity wafers with lower velocity “ambient” particles in the process cha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b9577db3c37c86b5ba556106562b5ae8
https://doi.org/10.1016/j.nimb.2005.05.009
https://doi.org/10.1016/j.nimb.2005.05.009
