Výsledky vyhledávání

Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure

Autor: William I. Milne, Andrew J. Flewitt, Norman A. Fleck, Jikui Luo, R. Huang, Yong Qing Fu, Johnny H. He, S.M. Spearing

Publikováno v: Sensors and Actuators A: Physical. 132:346-353

Multi-finger microcages with metal/diamond like carbon (DLC) bilayer and polymer/metal/DLC trilayer structures were analyzed, simulated and fabricated. Modelling by finite element analysis showed that a soft polymer can be used together with DLC to f

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5db06d34b5bcf4a233714330a3f18ccf
https://doi.org/10.1016/j.sna.2006.03.004

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High sensitivity piezoresistive cantilever sensor for biomolecular detection

Autor: Johnny H He, Yong Feng Li

Publikováno v: Journal of Physics: Conference Series. 34:429-435

Micro-cantilevers are now gaining popularity in biomolecular sensing. Monitoring and mass detection of biological species can be accurately determined using the micro- or nano- scale cantilevers. The targeted biological molecules are first immobilize

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::42d922012191e88889c4bdc458e751f5
https://doi.org/10.1088/1742-6596/34/1/070

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Self-Assembly Carbon Nanotubes on Cantilever Biosensor for Sensitivity Enhancement

Autor: Johnny H He, Jian-Shan Ye, Tit Meng Lim, Shao-qing Sun

Publikováno v: Journal of Physics: Conference Series. 34:423-428

In recent years, highly sensitive and selective as well as cost-effective sensing and detection of biomolecules (e.g. virus, bacterial, DNA and protein) by MEMS/NEMS (Micro- /Nano Electro- Mechanical-System) structures have attracted extensive attent

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ab1aa358b969fcab7c01b4508d1dac68
https://doi.org/10.1088/1742-6596/34/1/069

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Fabrication and characterization of diamond-like carbon/Ni bimorph normally closed microcages

Autor: S.M. Spearing, Johnny H. He, William I. Milne, Norman A. Fleck, Andrew J. Flewitt, Jikui Luo, Yong Qing Fu

Publikováno v: Journal of Micromechanics and Microengineering. 15:1406-1413

Normally closed microcages based on highly compressively stressed diamond-like carbon (DLC) and electroplated Ni bimorph structures have been simulated, fabricated and characterized. Finite-element and analytical models were used to simulate the devi

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6797224c6a21d9784b64e90266c56018
https://doi.org/10.1088/0960-1317/15/8/005

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A critical comparison and development of nano-mechanical characterization of MEMS/NEMS thin film materials

Autor: Johnny H. He, H. R. Le, Yong Qing Fu, David F. Moore, Jikui Luo

Publikováno v: SPIE Proceedings.

This paper compared the three different methods for determination of thin film modulus or MEMS applications: 1) scanning bending cantilever, 2) nanoindentation and 3) resonance frequency method. Surface profilometer was used to scan along the micro-m

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0022538f7714ab09e42af507732f8ac4
https://doi.org/10.1117/12.647295

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MEMS/NEMS mechanical characterization on different thin film materials by scanning along micro-machined cantilevers

Autor: H. R. Le, Johnny H. He, David F. Moore, Jikui Luo

Publikováno v: SPIE Proceedings.

Mechanical characterization is vital for the design of MEMS/NEMS. Many methods have been developed to measure the mechanical properties of materials; however, most of them are either too complicated, or expensive for industrial application, or not ac

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c2a2bc8c9f6dee42a17d8bcd0219d1f4
https://doi.org/10.1117/12.608710

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Development of an all-metal electrothermal actuator and its applications

Autor: S. Mark Spearing, WI Milne, Johnny H. He, Norman A. Fleck, Jikui Luo, David F. Moore, Andrew J. Flewitt

Publikováno v: SPIE Proceedings.

The in-plane motion of microelectrothermal actuator (''heatuator'') has been analyzed for Si-based and metallic devices. It was found that the lateral deflection of a heatuator made of a Ni metal is about ;60% larger than that of a Si-based actuator

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::24987d907b3fe7a18f6fb33e963c2653
https://doi.org/10.1117/12.524098

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Laser micromachining of thin films for optoelectronic devices and packages

Autor: Matthew A. Hopcroft, Richard R. A. Syms, David F. Moore, Billy Boyle, Johnny H. He, John A. Williams

Publikováno v: SPIE Proceedings.

Focused laser micromachining in an optical microscope system is used to prototype packages for optoelectronic devices and to investigate new materials with potential applications in packaging. Micromachined thin fims are proposed as mechanical compon

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::cf4288e223d7ffad1af150b895571952
https://doi.org/10.1117/12.468490

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Development of all metal electrothermal actuator and its applications

Autor: William I. Milne, S. Mark Spearing, Jack K. Luo, David F. Moore, Johnny H. He, Norman A. Fleck, Andrew J. Flewitt

Publikováno v: Journal of Micro/Nanolithography, MEMS, and MOEMS. 4:023012

The in-plane motion of microelectrothermal actuator ("heatuator") has been analyzed for Si-based and metallic devices. It was found that the lateral deflection of a heatuator made of a Ni metal is about ~60% larger than that of a Si-based actuator un

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::9f3f0ed979befae4b1510beb939f5f78
https://doi.org/10.1117/1.1898243

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