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Autor:
John Shih-Hua Chang
The metal multi-user micro-electro-mechanical-systems (MEMS) processes (MetalMUMPs®) micro-machining process includes two silicon nitride films, one polysilicon film, and one nickel film for constructing various MEMS devices. This thesis presents pr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a9c9d5fecc647ba630c58071f257fee6
https://doi.org/10.32920/ryerson.14643810
https://doi.org/10.32920/ryerson.14643810
