Zobrazeno 1 - 4
of 4
pro vyhledávání: '"John Masnik"'
Autor:
Zhigang Song, Tarl Gordon, Teng-Yin Lin, Kan Zhang, Neerja Bawaskar, Steve Crown, Yandong Liu, Martin O'tool, Kannan Sekar, Toni Laaksonen, Daniel Greenslit, Mark Lagus, Ishtiaq Ahsan, Bill Evans, Joerg Winkler, Shahrukh Khan, DK Sohn, Frank Barth, John Masnik
Publikováno v:
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Functional logic test structures with ATPG blocks and scan chains have been the traditional inline logic learning vehicle for technology learning and development. However, these test structures often need processing of wafers up to a higher BEOL proc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::af9c6803b34a79dc6e26839fa55284f7
https://doi.org/10.1109/asmc.2019.8791769
https://doi.org/10.1109/asmc.2019.8791769
Publikováno v:
International Symposium for Testing and Failure Analysis.
Nanoprobing, electrical probing (DC electrical measurement of semiconductors using nanoscale probes) on an electron microscopic scale, and EBAC, a high-resolution, static technique, can be used for isolating defects and improving failure analysis suc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e5ff3821a7c217026af385d6bbb50cb5
https://doi.org/10.31399/asm.cp.istfa2018p0397
https://doi.org/10.31399/asm.cp.istfa2018p0397
Publikováno v:
International Symposium for Testing and Failure Analysis.
OBIRCH is a static technique for isolating both high and low resistance failures in test structures that continues to be relevant to sub 14nm technologies. While limited resolution is a factor as devices get smaller, an approximate location is adequa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::de8ece208f4ecf3c05adc72c11c0ba49
https://doi.org/10.31399/asm.cp.istfa2018p0315
https://doi.org/10.31399/asm.cp.istfa2018p0315
Publikováno v:
International Symposium for Testing and Failure Analysis.
EBAC is a high-resolution, static technique that can be used for isolating electrical shorts, but it begins to fail for large, interconnected, test structures. In such cases, localization can be achieved when combined with optical localization techni
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2ccfc324694bcaf41ef0542c2efc7800
https://doi.org/10.31399/asm.cp.istfa2017p0336
https://doi.org/10.31399/asm.cp.istfa2017p0336