Zobrazeno 1 - 7
of 7
pro vyhledávání: '"John Leclair"'
Autor:
John Leclair, Heping Chen
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 34:87-93
Reducing variations of fabrication processes is a primary focus for improvement in etching process. One powerful tool employed towards this goal is Advanced Process Control (APC). APC adjusts recipes to compensate for measured variations. Systemic va
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::72c12306772a7928255babe4bac167bb
https://doi.org/10.1109/tsm.2020.3044818
https://doi.org/10.1109/tsm.2020.3044818
Autor:
Heping Chen, John Leclair
Publikováno v:
Journal of Manufacturing Processes. 61:454-460
Exploring optimal recipes to reduce dimensional variations is critical in etching processes. Variations in critical dimensions that were acceptable previously can become problematic because of smaller node sizes and more complex structures. Dry etch
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2a6dfcd4c409168a5c0db8b8e0f0fe72
https://doi.org/10.1016/j.jmapro.2020.11.022
https://doi.org/10.1016/j.jmapro.2020.11.022
Publikováno v:
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Variations in etch rates during plasma etching can occur due to differences in the conditioning of the inside surfaces of a plasma reactor. Passivation of the surfaces of the reactor wall by plasma generated species can change the composition of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::803129ea993f0954308b865eecd58690
https://doi.org/10.1109/asmc49169.2020.9185362
https://doi.org/10.1109/asmc49169.2020.9185362
Autor:
Samuel Nurko, Anthony Lembo, Saurabh Sethi, Vivian Cheng, John LeClair, Michael P. Jones, Cara Lembo, Elizabeth A. Friedlander, Richard Park, Andrea Bollom, Sage Mikami
Publikováno v:
Neurogastroenterology & Motility. 27:684-692
Background Functional gastrointestinal disorders (FGIDs) are among the most common outpatient diagnoses in pediatric primary care and gastroenterology. There is limited data on the inpatient burden of childhood FGIDs in the USA. The aim of this study
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::64c230eae590a07533cfa53f2573bc24
https://doi.org/10.1111/nmo.12542
https://doi.org/10.1111/nmo.12542
Autor:
Nidhi Sethi, Vaibhav Wadhwa, Saurabh Sethi, Sage Mikami, John LeClair, Richard Park, Anthony Lembo, Michael P. Jones, Alphonso Brown
Publikováno v:
Alimentary Pharmacology & Therapeutics. 38:1338-1346
Summary Background Irritable bowel syndrome (IBS) is one of the most common out-patient diagnoses in primary care and gastroenterology. There are limited data on the rate and costs associated with in-patient discharges for IBS. Aim To estimate the in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::eaae4f886ce10c447470735d9238632b
https://doi.org/10.1111/apt.12532
https://doi.org/10.1111/apt.12532
Autor:
Anthony Lembo, Nidhi Sethi, John LeClair, Vaibhav Wadhwa, Saurabh Sethi, Elizabeth A. Friedlander, Richard Park, Michael P. Jones, Andrea Bollom, Sage Mikami, Vivian Cheng
Publikováno v:
The American journal of gastroenterology. 109(2)
Constipation is one of the most common outpatient diagnoses in primary care and gastroenterology clinics; however, there is limited data on the inpatient burden of constipation in the United States. The aim of this study was to evaluate inpatient adm
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cc2473eb9121bda8a5c573f716e4a2fb
https://pubmed.ncbi.nlm.nih.gov/24419480
https://pubmed.ncbi.nlm.nih.gov/24419480
Autor:
John LeClair, Saurabh Sethi, Cara Lembo, Nidhi Sethi, Vaibhav Wadhwa, Filippo Cremonini, Anthony Lembo
Publikováno v:
American Journal of Gastroenterology. 108:S569
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f3fab8bbd6652b7e72d0764102bd4bbb
https://doi.org/10.14309/00000434-201310001-01882
https://doi.org/10.14309/00000434-201310001-01882