Zobrazeno 1 - 10
of 19
pro vyhledávání: '"John L. Vossen"'
Physics of Thin Films: Advances in Research and Development, Volume 12 reviews advances that have been made in research and development concerning the physics of thin films. This volume covers a wide range of preparative approaches, physics phenomena
Autor:
Werner Kern, John L. Vossen
Publikováno v:
Physics Today. 33:26-33
The enormous number of successful applications of thin films for a large variety of scientific, engineering and industrial purposes is in large measure due to the rapidly increasing scientific understanding of the nature of the processes used to depo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::785380905fcacb58b7864ebeb769b40b
https://doi.org/10.1063/1.2914077
https://doi.org/10.1063/1.2914077
Publikováno v:
Journal of Vacuum Science and Technology. 14:1053-1063
Techniques for forming dielectric layers for fabricating semiconductor components are reviewed, including (1) low‐pressure techniques: evaporation, sputtering, plasma deposition, and low‐pressure CVD, (2) techniques operating at one atmosphere to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d7ab67b10413140b8334a9456cd12399
https://doi.org/10.1116/1.569412
https://doi.org/10.1116/1.569412
Publikováno v:
11th Reliability Physics Symposium.
Improper coverage of surface topography can lead to a variety of reliability and yield problems in electron devices. The nature of coverage defects and failure mechanisms is discussed, and techniques for improving the reliability by chemical tapering
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::67d650245d08d371bcac10353b74c4cd
https://doi.org/10.1109/irps.1973.362599
https://doi.org/10.1109/irps.1973.362599
Autor:
John L. Vossen
Publikováno v:
Journal of Vacuum Science and Technology. 13:651-652
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9104e102064a2f343f3308fd3ed02544
https://doi.org/10.1116/1.569052
https://doi.org/10.1116/1.569052
Autor:
John L. Vossen
Publikováno v:
Physics Today. 34:71-72
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac89276412022dc65b4eda6c5cb6012d
https://doi.org/10.1063/1.2914712
https://doi.org/10.1063/1.2914712