Zobrazeno 1 - 10
of 42
pro vyhledávání: '"John H. Comtois"'
Publikováno v:
Sensors and Actuators A: Physical. 78:54-62
This paper presents an overview of Air Force research and development programs in micro-opto-electro-mechanical systems (MOEMS) for adaptive optics using commercially available surface-micromachined polysilicon fabrication processes. Adaptive optic s
Publikováno v:
Sensors and Actuators A: Physical. 70:23-31
This paper presents the results of tests performed on a variety of electrothermal microactuators and arrays of these actuators. The results are intended to aid designers of thermally actuated mechanisms, and they would apply to any surface micromachi
Publikováno v:
Sensors and Actuators A: Physical. 70:15-22
Methods of packaging microelectromechanical systems (MEMS) using two advanced multichip module (MCM) foundry processes are described. Special-purpose surface and bulk micromachined MEMS packaging test dies were designed and fabricated. The MEMS test
Autor:
John H. Comtois, Victor M. Bright
Publikováno v:
Sensors and Actuators A: Physical. 58:19-25
Electro-thermal (E-T) actuators have been developed to complement the capabilities of electrostatic actuators. The thermal actuators presented here can be arrayed to generate high forces. Equally significant is that the single actuators and arrays of
Publikováno v:
Sensors and Actuators A: Physical. 57:145-151
Vertically and laterally moving surface-micromachined polysilicon microelectromechanical gratings have been designed for optical switching and modulation applications. Analytical models for the gratings are developed using optical diffraction theory.
Publikováno v:
Proceedings of Ninth International Workshop on Micro Electromechanical Systems.
Two types of micro-electro-mechanical gratings have been designed for use as optical modulators. The gratings have been fabricated and experimentally characterized, yielding excellent results. Micro-electro-mechanical gratings are possible candidates
Publikováno v:
Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing.
An optical mirror for directing a laser parallel to the substrate surface has been designed and fabricated. The mirror consists of a 214 /spl mu/m/spl times/210 /spl mu/m, 3.5 /spl mu/m thick polysilicon plate, coated with a 0.5 /spl mu/m thick layer
Publikováno v:
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
Multichip module (MCM) packaging provides an efficient solution to integration of MEMS with microelectronics. In this paper, new methods of packaging MEMS using two advanced MCM foundry processes are described. A special purpose surface micromachined
Publikováno v:
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
A microelectromechanical system for the automated assembly of flip-up micro-structures has been designed and fabricated. The system consists of a vertical thermal actuator, a linear assembly micromotor, and a self-engaging locking mechanism. The vert
Publikováno v:
SPIE Proceedings.
This paper describes the design, fabrication, surface characterization, and adaptive optics simulation of advanced surface micromachined micromirror devices. Design considerations and fabrication capabilities are presented. Various shapes and array d