Zobrazeno 1 - 2
of 2
pro vyhledávání: '"John B. Slanina"'
Autor:
Peter Y. Wong, Patricia M. Nieva, John B. Slanina, Haruna Tada, Amy E. Kumpel, Paul M. Zavracky, Richard E. Lathrop, Ioannis N. Miaoulis
Publikováno v:
Journal of Applied Physics. 87:4189-4193
The rapid growth of microelectromechanical systems (MEMS) industry has introduced a need for the characterization of thin film properties at all temperatures encountered during fabrication and application of the devices. A technique was developed to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f489fbb81084afc61e9985633dab33db
https://doi.org/10.1063/1.373050
https://doi.org/10.1063/1.373050
Autor:
Patricia M. Nieva, Peter Y. Wong, Haruna Tada, Paul M. Zavracky, Richard E. Lathrop, Amy E. Kumpel, John B. Slanina, Ioannis N. Miaoulis
Publikováno v:
Review of Scientific Instruments. 71:161-167
An innovative system was designed to optically measure the curvature of microelectromechanical system at high temperatures. The system takes advantage of the limited numerical aperture of the imaging system to detect the curvature of cantilever beams
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8c054a5a787151cfb2ed5b98f27c2a0a
https://doi.org/10.1063/1.1150178
https://doi.org/10.1063/1.1150178