Výsledky vyhledávání - "Johann Vertommen"

Study of a Metal Gate and Silicon Selective 'Dry Ash Only' Process for Combined Extension and Halo Implanted Photo Resist

Autor: Geert Mannaert, D. Goossens, Johann Vertommen, Werner Boullart, Mikhail R. Baklanov

Publikováno v: Solid State Phenomena. 134:113-116

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::1d980566915c857cf1529f45c23b6155
https://doi.org/10.4028/www.scientific.net/ssp.134.113

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Confined Chemical Cleaning: A Novel Concept Evaluated for Front End of Line Applications

Autor: Ingrid Vos, Stefan Peeters, Rita Verbeeck, Werner Boullart, Johann Vertommen

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::40604afe3231aa89724c73688b872618
https://doi.org/10.4028/3-908451-46-9.121

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Study of a Metal Gate and Silicon Selective 'Dry Ash Only' Process for Combined Extension and Halo Implanted Photo Resist

Autor: G. Mannaert, Mikhail R. Baklanov, D. Goossens, Johann Vertommen, Werner Boullart

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::db75140d270d80b6013a8ee2abe6019f
https://doi.org/10.4028/3-908451-46-9.113

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