Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Joanne Ching Yee Wong"'
Autor:
Tze Chiang Tin, Saw Chin Tan, Hing Yong, Jimmy Ook Hyun Kim, Eric Ken Yong Teo, Joanne Ching Yee Wong, Ching Kwang Lee, Peter Than, Angela Pei San Tan, Siew Chee Phang
Publikováno v:
IEEE Access, Vol 9, Pp 114255-114266 (2021)
Virtual metrology (VM) is an enabling technology capable of performing virtual inspection on the metrology quality of wafers. Instead of physically acquiring the metrology measurements, VM applies conjecture models on the process data of wafers to es
Externí odkaz:
https://doaj.org/article/1af0ef8f16bd4ef98eb015984544eed7
Autor:
Jimmy Ook Hyun Kim, Ching Kwang Lee, Tze Chiang Tin, Hing Yong, Joanne Ching Yee Wong, Peter Than, Saw Chin Tan, Angela Pei San Tan, Siew Chee Phang, Eric Ken Yong Teo
Publikováno v:
IEEE Access, Vol 9, Pp 114255-114266 (2021)
Virtual metrology (VM) is an enabling technology capable of performing virtual inspection on the metrology quality of wafers. Instead of physically acquiring the metrology measurements, VM applies conjecture models on the process data of wafers to es
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c07088dc03d1bbb4694fe965ea5970ee
https://doi.org/10.1109/access.2021.3103235
https://doi.org/10.1109/access.2021.3103235