Zobrazeno 1 - 2
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pro vyhledávání: '"Joanna Bitterli"'
Publikováno v:
Journal of Microelectromechanical Systems. 22:855-864
Parylenes are used for a wide range of applications in microelectromechanical systems (MEMS) devices. However, their poor adhesion in a harsh liquid environment can limit the fabrication processes of complex MEMS and bioMEMS devices. Potassium hydrox
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0fc5b296d403e668adb6618f23474d45
https://doi.org/10.1109/jmems.2013.2248126
https://doi.org/10.1109/jmems.2013.2248126
Autor:
André Meister, Michael Gabi, Pascal Behr, Philipp Studer, János Vörös, Philippe Niedermann, Joanna Bitterli, Jérôme Polesel-Maris, Martha Liley, Harry Heinzelmann, Tomaso Zambelli
Publikováno v:
Nano Letters; Jun2009, Vol. 9 Issue 6, p2501-2507, 7p