Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jiunn-Gung Lo"'
Publikováno v:
Journal of the Chinese Chemical Society. 41:685-692
An FTIR spectrometer having a long absorbing path in an open field mode is applied to measure the air quality of semiconductor facilities, especially for chemical solvent vapors. This spectrometer is demonstrated to be a proper instrument to monitor
Publikováno v:
Journal of the Chinese Chemical Society. 24:21-23