Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Jiro Masui"'
Publikováno v:
Applied optics. 26(9)
An ultrahigh accuracy 3-D profilometer using a laser heterodyne interferometer has been developed. The profiles of aspheric lenses and their molds have been measured. It can measure not only the rectangular coordinates but also the polar coordinates