Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Jiro Kamiya"'
Autor:
Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya, Kazuhiro Hane
Publikováno v:
Micromachines, Vol 7, Iss 4, p 57 (2016)
This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning r
Externí odkaz:
https://doaj.org/article/ae2104f31ceb4d82ad02e3466f3b3343
Autor:
Kazuhiro Hane, Toshikazu Kamiya, Jiro Kamiya, Hiromasa Furuta, Kenta Nakazawa, Takashi Sasaki
Publikováno v:
Journal of Microelectromechanical Systems. 26:440-447
We present a varifocal mirror integrated with a comb-drive scanner (varifocal scanner) fabricated by using a wafer bonding technology. An Au-Au thermocompression bonding technology is utilized for the integration. The bonding technology enables fabri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e18f31773ee0bc69c9157ebe4c5a9db6
https://doi.org/10.1109/jmems.2017.2661979
https://doi.org/10.1109/jmems.2017.2661979
Publikováno v:
2017 International Conference on Optical MEMS and Nanophotonics (OMN).
We present the varifocal scanner combined with the piezoresistors to monitor the rotation angle and focal length. The angle sensor measures with the accuracy of ±0.021 degree in the range of ±1.2 degree.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c52b77f6f84d1b215df1cf9927a3e4f
https://doi.org/10.1109/omn.2017.8051506
https://doi.org/10.1109/omn.2017.8051506
Autor:
Kenta Nakazawa, Jiro Kamiya, Toshikazu Kamiya, Hideki Sasaki, Takashi Sasaki, Kazuhiro Hane, Hiromasa Furuta
Publikováno v:
2016 International Conference on Optical MEMS and Nanophotonics (OMN).
The integration of a varifocal mirror with a scanner using wafer bonding technology is presented. The wafer bonding technology enables us to enlarge the design possibility. A 2 mm diameter varifocal mirror is bonded on the scanner. The optical scanni
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1af42a923725736b67e264ec386d9d6d
https://doi.org/10.1109/omn.2016.7565907
https://doi.org/10.1109/omn.2016.7565907
Autor:
Jiro Kamiya, Kenta Nakazawa, Takashi Sasaki, Hideki Sasaki, Hiromasa Furuta, Kazuhiro Hane, Toshikazu Kamiya
Publikováno v:
Micromachines
Micromachines, Vol 7, Iss 4, p 57 (2016)
Micromachines; Volume 7; Issue 4; Pages: 57
Micromachines, Vol 7, Iss 4, p 57 (2016)
Micromachines; Volume 7; Issue 4; Pages: 57
This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6ae749dcd3ada576af1e87f8bcf9b438
http://europepmc.org/articles/PMC6190170
http://europepmc.org/articles/PMC6190170
Autor:
Kazuhiro Hane, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Toshikazu Kamiya, Kenta Nakazawa
Publikováno v:
2015 International Conference on Optical MEMS and Nanophotonics (OMN).
An electrostatically actuated resonant varifocal mirror with a piezoresistive displacement sensor is reported. The focal length of the varifocal mirror is monitored by the sensor. The device is fabricated from a silicon-on-insulator wafer and a glass
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2cd921ab1918d151f64e7ef545a5f959
https://doi.org/10.1109/omn.2015.7288895
https://doi.org/10.1109/omn.2015.7288895
Autor:
Hiromasa Furuta, Toshikazu Kamiya, Kenta Nakazawa, Jiro Kamiya, Kazuhiro Hane, Hideki Sasaki, Takashi Sasaki
Publikováno v:
Applied Optics. 56:6911
A confocal laser displacement sensor using a micro-machined varifocal mirror is reported. The focal length modulation is a key function of the confocal sensor. The mechanism of the focal length modulation determines the measurement speed and range. H
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::12160a8fa4a397efa2951e83b818d781
https://doi.org/10.1364/ao.56.006911
https://doi.org/10.1364/ao.56.006911