Zobrazeno 1 - 10
of 50
pro vyhledávání: '"Jimmie J. Wortman"'
Autor:
N. Yang, Jimmie J. Wortman
Publikováno v:
Microelectronics Reliability. 41:37-46
This work examined various components of direct gate tunneling currents and analyzed reliability of ultrathin gate oxides (1.4–2 nm) in scaled n-metal-oxide-semiconductor field effective transistor (MOSFETs). Direct gate tunneling current component
Autor:
Jimmie J. Wortman, Eric M. Vogel, Veena Misra, N. Yang, J. Ganem, Jay Hauser, Pascal Masson, C.E. Weintraub
Publikováno v:
IEEE Transactions on Electron Devices. 48:2754-2762
The application of low-frequency charge pumping to obtain near-interface, or bulk trap densities, on thin stacked gate dielectrics is studied. A review of the theory governing the low-frequency charge pumping technique, developed to extract bulk trap
Publikováno v:
IEEE Transactions on Electron Devices. 47:1393-1400
Off-state leakage currents have been investigated for sub-100 nm CMOS technology. The two leakage mechanisms investigated in this work include conventional off-state leakage due to short channel effects and gate leakage through ultrathin gate oxides.
Publikováno v:
IEEE Transactions on Electron Devices. 47:1349-1354
In this work, five methods for measuring the thickness of ultra-thin gate oxide layers in MOS structures were compared experimentally on n/sup +/ poly-SiO/sub 2/-p-Si structures. Three methods are based on electrical capacitance-voltage (C-V) and cur
Publikováno v:
IEEE Transactions on Electron Devices. 47:1636-1644
This work examines different components of leakage current in scaled n-MOSFET's with ultrathin gate oxides (1.4-2.0 nm). Both gate direct tunneling and drain leakage currents are studied by theoretical modeling and experiments, and their effects on t
Publikováno v:
Microelectronic Engineering. 48:211-214
This study reports on n-channel MOS transistors using very thin oxynitride gate dielectrics deposited by Low-Pressure Rapid Thermal Chemiical Vapor Deposition (LPRTCVD). The threshold voltage, the transconductance, the fast and slow trap densities, t
Publikováno v:
IEEE Transactions on Electron Devices. 46:1464-1471
Using both quantum mechanical calculations for the silicon substrate and a modified WKB approximation for the transmission probability, direct tunneling currents across ultra-thin gate oxides of MOS structures have been modeled for electrons from the
Autor:
B. Balland, Jimmie J. Wortman, Pascal Masson, Jean-Luc Autran, Eric M. Vogel, J Brini, P. Morfouli
Publikováno v:
Journal of Non-Crystalline Solids. 245:54-58
Slow traps and interface traps density has been measured using low frequency (10 Hz) noise and charge pumping measurements. The study has been carried out on n-channel metal-oxide-semiconductor transistors with ultra thin gate dielectrics prepared by
A Low‐Thermal‐Budget In Situ Doped Multilayer Silicon Epitaxy Process for MOSFET Channel Engineering
Publikováno v:
Journal of The Electrochemical Society. 146:1189-1196
This paper describes an in situ boron‐doped, multilayer epitaxial silicon process that can be used to obtain doping profiles for channels in the deep‐submicron regime. We have extensively studied lightly doped channel structures in which an intri
Autor:
Eric M. Vogel, Jay Hauser, W.K. Henson, Gerald Lucovsky, Khaled Ahmed, B.E. Hornung, P.K. McLarty, Jimmie J. Wortman
Publikováno v:
IEEE Transactions on Electron Devices. 45:1350-1355
The effect of dielectric constant and barrier height on the WKB modeled tunnel currents of MOS capacitors with effective oxide thickness of 2.0 nm is described. We first present the WKB numerical model used to determine the tunneling currents. The re