Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Jianlong Yao"'
Autor:
Mark W. Raynor, Adam Seymour, Jianlong Yao, E. W. Olsen, Carrie L. Wyse, Robert Torres, Praveen Jha
Publikováno v:
ECS Transactions. 13:71-77
Anhydrous HBr used in etch processing for the semiconductor industry requires strict impurity control. However, the gas cylinder material of construction plays a critical role in controlling and maintaining purity levels of the delivered HBr process
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4d6c00fafe36fb36bebdf1eb26ce8ed9
https://doi.org/10.1149/1.3035369
https://doi.org/10.1149/1.3035369
Autor:
Jianlong Yao, Fernandez, Jose A.
Publikováno v:
Journal of Chemical Physics; 12/1/1997, Vol. 107 Issue 21, p8813, 10p, 3 Diagrams, 5 Charts, 8 Graphs
Autor:
Jianlong Yao, Bernstein, Elliot R.
Publikováno v:
Journal of Chemical Physics; 9/1/1997, Vol. 107 Issue 9, p3352, 11p, 3 Diagrams, 7 Charts, 16 Graphs
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 22:437-440
The formation of trace moisture by exposure of dry heated surfaces of 316 L stainless-steel, Restek Silcosteel®, and nickel 1/8 in. outer diameter line segments to purified Ar and H2 was studied using atmospheric pressure ionization mass spectrometr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a3f90bff0db27914880ac3d9ec588284
https://doi.org/10.1116/1.1641053
https://doi.org/10.1116/1.1641053
Autor:
Mark W. Raynor, Carrie L. Wyse, Robert Torres, Jianlong Yao, Adam Seymour, Ryan P. Pemberton, Jinhee Lee, Tanya Evdokimova, Wonduk Jung
Publikováno v:
ECS Meeting Abstracts. :1862-1862
Anhydrous HBr used in reactive ion etch chemistries for the semiconductor industry requires strict control of impurities over time. Proper selection of cylinder materials strongly influences the purity of the HBr over the shelf life of the stored gas
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::36ca61aa7640252a1e53b610b4b83f60
https://doi.org/10.1149/ma2008-02/23/1862
https://doi.org/10.1149/ma2008-02/23/1862
Publikováno v:
ECS Meeting Abstracts. :1544-1544
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0ea74eb837bc01a13cbfaebf37122448
https://doi.org/10.1149/ma2008-02/17/1544
https://doi.org/10.1149/ma2008-02/17/1544
Publikováno v:
ECS Meeting Abstracts. :753-753
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::45046b94ff9043688595aa766b187aeb
https://doi.org/10.1149/ma2008-01/19/753
https://doi.org/10.1149/ma2008-01/19/753
Publikováno v:
ECS Meeting Abstracts. :77-77
The distribution of water between gas and liquid phases was investigated for high purity HBr cylinders, and standard enthalpy of vaporization and Henry's law constant for trace amount of water in HBr were extracted. In the 3-32 {degree sign} C temper
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e51103855974089d4da59aca315af915
https://doi.org/10.1149/ma2007-01/12/77
https://doi.org/10.1149/ma2007-01/12/77
Publikováno v:
Solid State Technology. Oct2004, Vol. 47 Issue 10, p49-54. 4p.
Publikováno v:
Catalysis Letters; January 1990, Vol. 4 Issue: 1 p63-74, 12p