Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Jian-lin Cao"'
Publikováno v:
Mechanical Engineering and Control Systems.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1f6fc136f293a28701a9d3c15239781f
https://doi.org/10.1142/9789813208414_0062
https://doi.org/10.1142/9789813208414_0062
Autor:
Yun-Peng Li, Xiaodong Wang, Zhang Hongji, Bin Chen, Hai-Feng Wang, Haibo Li, Yang Liu, Bo Chen, Suli Han, Xin Zheng, Xiaoduo Wang, Jian-lin Cao, Fei He
Publikováno v:
Applied Surface Science. 317:902-907
To investigate the environmental adaptability of the Mo/Si multilayers on lunar surface, we studied the stability and stress of Mo/Si multilayers under the low and high temperature environment. The in-situ X-ray diffraction (XRD) and the ex-situ intr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d5a3fa28539934bf671151c37a9a8113
https://doi.org/10.1016/j.apsusc.2014.08.188
https://doi.org/10.1016/j.apsusc.2014.08.188
Publikováno v:
Science China Physics, Mechanics and Astronomy. 54:406-410
This paper first reviews an EUV normal incidence solar telescope that we have developed in our lab. The telescope is composed of four EUV telescopes and the operation wavelengths are 13.0 nm, 17.1 nm, 19.5 nm, and 30.4 nm. These four wavelengths, fun
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::721f08ae3f78e27151175df06e83fe8f
https://doi.org/10.1007/s11433-010-4239-z
https://doi.org/10.1007/s11433-010-4239-z
Autor:
Xin Zheng, Xiaoduo Wang, Yun-Peng Li, Fei He, Hai-Feng Wang, Hua-bin Yang, Bo Chen, Jian-lin Cao, Xiaodong Wang, Zhang Hongji
Publikováno v:
International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies.
Applications of Mo/Si multilayer mirrors for the moon-based extreme ultraviolet Camera (EUVC) require not only the minimal residual stress, but also little stress changes in the temperature environment on lunar surface. Hence, we deposit the 16.5 nm
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c111004de03ba8025a55c593cdb76e4b
https://doi.org/10.1117/12.2073023
https://doi.org/10.1117/12.2073023
Publikováno v:
Guang pu xue yu guang pu fen xi = Guang pu. 31(4)
To meet the research requirement of Ne-like Ge X-ray laser, we designed and fabricated soft X-ray multilayer mirrors at 23.4 nm. New material combination Ti/Si has been chosen based on the material selecting rule, considering the optical characterist
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::9c178e4d735f2ece0daef4b36ebdb940
https://pubmed.ncbi.nlm.nih.gov/21714278
https://pubmed.ncbi.nlm.nih.gov/21714278
Publikováno v:
Optics & Laser Technology. 32:117-119
Low debris laser plasma soft X-ray source is of great importance to micro-lithography and microscopy. In this paper, a 1.06 mu m YAG laser with 2 J energy, 10 ns duration is employed to irradiate a CO2 cryogenic target. Soft X-ray spectra from the CO
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::979964f32959389f969ebbe26a49d495
https://doi.org/10.1016/s0030-3992(00)00026-8
https://doi.org/10.1016/s0030-3992(00)00026-8
Publikováno v:
SPIE Proceedings.
The authors have developed an experimental system for the studies of extreme ultraviolet projection lithography at 13.0nm wavelength, which includes a laser plasma source, an ellipsoidal condenser, a transmission mask and a Schwarzschild optics. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e2e729b97d673136f9c1a6b3da123a7b
https://doi.org/10.1117/12.782464
https://doi.org/10.1117/12.782464
Publikováno v:
Chinese Physics Letters. 15:522-524
The thermal and chemical stabilities of Mo/Si multilayer structure used in Bragg-Fresnel optics were studied to get optimal technological parameters of pattern generation. Mo/Si multilayers were annealed at temperature ranging from 360 to 770 K, trea
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ff9502a1456b016b813651e6de867761
https://doi.org/10.1088/0256-307x/15/7/019
https://doi.org/10.1088/0256-307x/15/7/019
Publikováno v:
Guang pu xue yu guang pu fen xi = Guang pu. 25(3)
The soft X-ray and vacuum ultraviolet sources developed in CIOMP are presented. The wall-stabilized argon arc source with spectrum stability and repeatability of +/-0.3% is applied to the calibration of spectrum intensity distribution of the vacuum u
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::455082e7b574199e51ac0ff32a22d6eb
https://pubmed.ncbi.nlm.nih.gov/16013306
https://pubmed.ncbi.nlm.nih.gov/16013306
Publikováno v:
Guang pu xue yu guang pu fen xi = Guang pu. 24(1)
This paper presents a method to detect and measure spectrum intensity from a laser plasma soft X-ray source. A Channel Electron Multiplier (CEM) and a calibrated silicon photodiode were used as detectors in this method, the former is a nonstandard de
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::18108540a102c393139277bd85c97e31
https://pubmed.ncbi.nlm.nih.gov/15768961
https://pubmed.ncbi.nlm.nih.gov/15768961