Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Jian-Ping Yun"'
Publikováno v:
Precision Engineering. 33:202-208
A novel hybrid measuring instrument, developed for the characterization of engineering surface, is presented. This instrument is capable of contact and non-contact measurement, and both measurement systems are based on a Linnik interference microscop
Publikováno v:
Key Engineering Materials. :371-376
We have constructed a novel contact stylus profilometer which is, in a certain sense, a combination of a lever system, an x-y stage, a vertical scanning stage and a Linnik microscope interferometer with a spatially and temporally incoherent light sou