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Autor:
Doris Keh Ting Ng, Linfang Xu, Yuan Hsing Fu, Weiguo Chen, Chong Pei Ho, Jia Sheng Goh, Wing Wai Chung, Norhanani Jaafar, Qingxin Zhang, Lennon Yao Ting Lee
Publikováno v:
Advanced Electronic Materials, Vol 9, Iss 8, Pp n/a-n/a (2023)
Abstract Gas sensors are useful for monitoring of greenhouse gases. As the move toward complementary metal‐oxide‐semiconductor (CMOS) compatible pyroelectric room temperature detectors is gaining traction due to its scalability to 8‐in./12‐in
Externí odkaz:
https://doaj.org/article/288cbda399624b56ba8e4befb754345c