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Publikováno v:
IEEE Transactions on Electron Devices. 67:3861-3867
The scaling trends of monolithic 3-D (M3-D) complementary metal–oxide–semiconductor (CMOS) nanoelectromechanical (NEM) reconfigurable logic (RL) circuits are compared with CMOS-only circuits for the first time. It is confirmed that M3-D CMOS-NEM
Autor:
Woo Young Choi, Ji Wang Ko
Publikováno v:
Journal of Nanoscience and Nanotechnology. 20:4176-4181
Monolithic-three-dimensional (M3D) CMOS-nanoelectromechanical (CMOS-NEM) hybrid reconfigurable logic (RL) circuits are compared and analyzed with CMOS-only RL ones in the 130-nm CMOS technology node. M3D CMOS-NEM hybrid RL circuits are superior to CM