Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Ji Jheng Shih"'
Autor:
Chienliu Chang, Kuang-Chong Wu, Masayoshi Esashi, Yeong-Feng Wang, Chih-Kung Lee, Yusuke Kawai, Yoshiaki Kanamori, Ji Jheng Shih
Publikováno v:
Journal of Micromechanics and Microengineering. 15:580-585
This paper reports solutions to the issues of profile control, microloading effect and suppression of the sidewall roughness of submicrometer trenches by modifying the regular conditions of the Bosch process that is often employed in the inductively
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::81de1c314f972373290b5aa363f33439
https://doi.org/10.1088/0960-1317/15/3/020
https://doi.org/10.1088/0960-1317/15/3/020
Autor:
Ji-Jheng Shih, 施繼正
93
The project is aimed at developing the mold fabrication and the imprinting recipe for nano-imprint (NIL). For fabrication of a nano-imprinting mold, the electron beam lithography and ICP(Inductively Coupled Plasma) dry etching will be mainly
The project is aimed at developing the mold fabrication and the imprinting recipe for nano-imprint (NIL). For fabrication of a nano-imprinting mold, the electron beam lithography and ICP(Inductively Coupled Plasma) dry etching will be mainly
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/24214079882942995258
Autor:
Ji-Jheng, Shih
Thesis (M.A.)--National Taiwan University Graduate Institute of Bio-Industrial Mechatronics Engineering
Non-Latin script record. Includes bibliographical references
Non-Latin script record. Includes bibliographical references