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pro vyhledávání: '"Jh Han Jun-Hee Han"'
Autor:
J-H. Kim, Sj You Shin-Jae You, Km Roh Ki-Min Roh, Dj Seong Dae-Jin Seong, Dw Kim Dae-Woong Kim, Jh Han Jun-Hee Han
Publikováno v:
Thin Solid Films. 519:6649-6653
To investigate the effect of the gun size on plasma and carbon nitride film deposition characteristics in RF magnetron sputtering system, we performed the RF sputtering deposition with different gun sizes and targets (50.8 mm and 76.2 mm in diameter)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6b28ba498296c0dc26a13877f594304e
https://doi.org/10.1016/j.tsf.2011.04.089
https://doi.org/10.1016/j.tsf.2011.04.089
