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Autor:
Mehul A. Trivedi, Roger F. Dickey, Paul Pinsukanjana, Jared Hubbard, Yung-Chung Kao, Philip S. Kao, J. Marquis, Sam P. Kuo, Jerry M.-S. Tsai
Publikováno v:
Journal of Crystal Growth. 251:124-129
Atomic absorption optical-based flux monitor (OFM) has been implemented as a non-invasive in situ measurement tool for production MBE operation. For our setup, the optical probe beam samples the group III beam fluxes (Al, Ga, and In) by passing just