Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Jerry L. Leonard"'
Publikováno v:
Journal of Environmental Economics and Management. 41:33-43
Permit allocation methods offer a way of estimating the value of non-marketed elk hunting. Applicants compete for elk hunting permits in Colorado by acquiring preference points that have a monetary cost and by distributing themselves among hunts unti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::901f9a12322cf03e40c97627ef612829
https://doi.org/10.1006/jeem.2000.1129
https://doi.org/10.1006/jeem.2000.1129
Publikováno v:
SPIE Proceedings.
Increasingly stringent requirements on the performance of diffractive optical elements (DOEs) used in wafer scanner illumination systems are driving continuous improvements in their associated manufacturing processes. Specifically, these processes ar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0fe5932419e7d32aa5adc61b4f17e7ef
https://doi.org/10.1117/12.859893
https://doi.org/10.1117/12.859893
Autor:
Jared D. Stack, Jerry L. Leonard, Kevin Welch, John E. Childers, Marc D. Himel, Rich Jones, James Carriere
Publikováno v:
Optical Microlithography XXI.
We present advancements in the manufacture of high-performance diffractive optical elements (DOEs) used in stepper/scanner off-axis illumination systems. These advancements have been made by employing high resolution lithographic techniques, in combi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::290bd1d140d995039054f7cc2f5b3f4a
https://doi.org/10.1117/12.774666
https://doi.org/10.1117/12.774666
Publikováno v:
Micromachining Technology for Micro-Optics and Nano-Optics.
As CDs continue to shrink, lithographers are moving towards using off-axis illumination while continuing to decrease the operating wavelength to improve their CD budget. Currently DUV lithography at 248nm and 193nm are driving the ability of the foun
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6ba0ac240145923be8912ca9f9d4917c
https://doi.org/10.1117/12.477845
https://doi.org/10.1117/12.477845
Autor:
Menelaos K. Poutous, Jared D. Stack, Alan D. Kathman, William F. Delaney, Marc D. Himel, Adam S. Fedor, Jerry L. Leonard, Robert E. Hutchins
Publikováno v:
SPIE Proceedings.
As CDs continue to shrink, lithographers are moving more towards using off-axis illumination schemes to increase their CD budget. There have been several papers over the last few years describing various custom illumination profiles designed for appl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3ccb94d7a62a56f71f4ed306ed44931a
https://doi.org/10.1117/12.474543
https://doi.org/10.1117/12.474543
Publikováno v:
SPIE Proceedings.
We report our progress on integrated phosphorus-doped SiO2 optical waveguide delay lines and membrane optical routing switches for phased-array radar control. We have completed the design and layout of the delay lines for the two shortest bits. We ha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::35c1774be4b8b53d71333d31f9d195f8
https://doi.org/10.1117/12.212044
https://doi.org/10.1117/12.212044
Publikováno v:
SPIE Proceedings.
The development of low-loss, low-cost integrated optical switches is critical for radar phase control applications. We report recent progress in integrated phosphorous-doped SiO2 on Si (PSG) waveguide optical routing switches based on electro-static
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ec4f9d0ed88470d13fdcdafa79bf8527
https://doi.org/10.1117/12.178054
https://doi.org/10.1117/12.178054
Publikováno v:
SPIE Proceedings.
Deformable Mirror Devices (DMDs) have been under development at Texas Instruments for several years, primarily as spatial light modulators for free-space optical applications such as analog phase modulation and digital projection imaging. A DMD consi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a1780e4c106c49b70cc556973ae27b7f
https://doi.org/10.1117/12.141225
https://doi.org/10.1117/12.141225
Autor:
Jerry L. Leonard, Gregory A. Magel
Publikováno v:
Optical Technology for Microwave Applications VI and Optoelectronic Signal Processing for Phased-Array Antennas III.
The design, fabrication, and performance characteristics of passive waveguides and micromechanical switches for use as time delays for phased-array antennas are discussed. The approach considered here is to fabricate the optical waveguides and switch
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::919514d722c3635756f2891b0022f5cf
https://doi.org/10.1117/12.138405
https://doi.org/10.1117/12.138405
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