Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Jerome B. Sohn"'
Publikováno v:
Sensors and Actuators A: Physical. 40:49-55
We have demonstrated the ability to fabricate stress-free micromechanical cantilever beams by selective etching of silicon p—n structures in HF solutions utilizing a photoassisted electrochemical process. A particular novelty of this technique is t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c4283ebf6b2608ca471da652f6aac35c
https://doi.org/10.1016/0924-4247(94)85029-1
https://doi.org/10.1016/0924-4247(94)85029-1
Publikováno v:
[1993] Proceedings IEEE Micro Electro Mechanical Systems.
Stress-free micromechanical cantilever beams have been fabricated by selective etching of silicon p-n structures in HF solutions utilizing a photo-assisted electrochemical process. With this technique, n or p regions can be selectively etched at cont
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b86d363d68cc143cc5e7d602d17d1352
https://doi.org/10.1109/memsys.1993.296918
https://doi.org/10.1109/memsys.1993.296918
Autor:
R. Fields, Brenda Hugh, J. Campbell, Jeffrey T. Borenstein, James R. Cousens, Les Niles, Paul Greiff, Jerome B. Sohn, Jonathan J. Bernstein, Robert K. Cunningham, Marc S. Weinberg
Publikováno v:
SPIE Proceedings.
Draper Laboratory, using silicon microfabrication techniques to achieve high yields by batch processing, has been developing miniature microelectromechanical instruments for over 10 years. During this time, considerable progress has been made in the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d746df399a8d5822a8842828a51b2fd3
https://doi.org/10.1117/12.251201
https://doi.org/10.1117/12.251201
Publikováno v:
SPIE Proceedings.
Micromachined silicon sensors often exhibit curvature of released membrane structures due to internal stresses, doping gradients, and crystalline defects. This curvature can be a significant source of error in inertial sensors such as accelerometers
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::27d6a8a03b7bfbe6c469ad8adaa0f6e8
https://doi.org/10.1117/12.251238
https://doi.org/10.1117/12.251238
Autor:
Michael Peech, Jerome B. Sohn
Publikováno v:
Soil Science. 85:1-9
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b94f59b3face288e4e43ccdca24c5c05
https://doi.org/10.1097/00010694-195801000-00001
https://doi.org/10.1097/00010694-195801000-00001
Conference
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Conference
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Autor:
Gale Research Inc
This respected resource is a biographical dictionary of the significant players in the physical, biological and related sciences. Each edition includes biographical entries on nearly 135,000 living scientists, providing birthdate; birthplace; field o
Autor:
Tracie Moy
Profiles living persons in the physical and biological fields, as well as public health scientists, engineers, mathematicians, statisticians, and computer scientists.