Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jeroen Huijbregste"'
Autor:
Andre Bernardus Jeunink, Geert Simons, Jeroen Huijbregste, Ramon Navarro, Bart Luc Swinnen, Frank van Bilsen, Hoite Pieter Theodoor Tolsma, Henry Megens, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen
Publikováno v:
SPIE Proceedings.
After the introduction of the ATHENATM alignment sensor, advanced applications of the sensor data are becoming increasingly important to meet the tightening overlay specifications for future technology nodes. As part of the total overlay budget, the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b5721f3c532b4b808a94560a65b9a94f
https://doi.org/10.1117/12.482814
https://doi.org/10.1117/12.482814
Autor:
Bernard Dam, R.P. Griessen, Troy C. Messina, J.H. Rector, Jeroen Huijbregste, John T. Markert
Publikováno v:
Superconducting and Related Oxides: Physics and Nanoengineering IV.
We report laser-ablation studies of highly-oriented thin films of the electron-doped infinite-layer copper-oxide compounds Sr 1- x La x CuO 2 . The primary synthesis variables were substrate or buffer layer material, temperature, laser fluence, targe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::05178ba8920e7724fe9b311a3570551e
https://doi.org/10.1117/12.397832
https://doi.org/10.1117/12.397832