Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Jeroen G. A. van Kasteren"'
Autor:
Jeroen G. A. van Kasteren, Saravana B. Basuvalingam, Miika Mattinen, Andrea E. A. Bracesco, Wilhelmus M. M. Kessels, Ageeth A. Bol, Bart Macco
Publikováno v:
Chemistry of Materials, 34(17), 7750-7760. American Chemical Society
In this work, atomic layer deposition (ALD) has been employed to prepare titanium oxysulfide (TiOxSy) thin films. Compositional control was achieved through a supercycle approach, where the ALD processes of TiOx and TiSx were interleaved. ALD was per
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7c529d0d5262068768f3cbf2c5b909ca
https://doi.org/10.1021/acs.chemmater.2c01033
https://doi.org/10.1021/acs.chemmater.2c01033
