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Akademický článek

Nanophotonic integrated active-passive InP membrane devices and circuits fabricated using ArF scanner lithography

Autor: Aleksandr Zozulia, Jeroen Bolk, Rene van Veldhoven, Gleb Nazarikov, Vadim Pogoretskiy, Samir Rihani, Graham Berry, Kevin Williams, Yuqing Jiao

Publikováno v: Micro and Nano Engineering, Vol 23, Iss , Pp 100258- (2024)

We present a novel fabrication approach to an integrated nanophotonic platform, based on a III-V membrane bonded to a Si substrate with benzocyclobutene (BCB). The process incorporates a hybrid lithography strategy combining deep-UV and electron-beam

Externí odkaz: https://doaj.org/article/9b2a6ff8609e4356bd0977cc4a77f4a0

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Indium phosphide membrane nanophotonic integrated circuits on silicon

Publikováno v: Physica Status Solidi (A) Applications and Materials Science, 217(3):1900606. Wiley-VCH Verlag
physica status solidi (a)

Photonic integration in a micrometer-thick indium phosphide (InP) membrane on silicon (IMOS) offers intrinsic and high-performance optoelectronic functions together with high-index-contrast nanophotonic circuitries. Recently demonstrated devices have

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::349a10e5451f5bbc8858a886307621dc
https://research.tue.nl/nl/publications/8dd93fa2-7aa6-44f9-84ea-905d9ed53a08

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Deep UV lithography process in generic InP integration for arrayed waveguide gratings

Autor: Sylwester Latkowski, Kevin A. Williams, Huub Ambrosius, LM Luc Augustin, E. Bitincka, J. Darracq, Jeroen Bolk, Ripalta Stabile, D. Marsan, Xaveer Leijtens

Publikováno v: IEEE Photonics Technology Letters, 30(13), 1222-1225. Institute of Electrical and Electronics Engineers

Low-excess-loss arrayed waveguide gratings are enabled by unique application of deep UV lithography in InP integrated photonics through reduced feature sizes and, more specifically, well-resolved inter-waveguide gap dimensions. Submicrometer wafer-fl

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6fa92f0d2dfdfe42330550b6589a47c9
https://research.tue.nl/en/publications/cfa59d30-939c-4982-bd8a-c17d5aebcd3e

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InP-based generic foundry platform for photonic integrated circuits

Autor: Arjen Bakker, Dan Zhao, Erik den Haan, Sylwester Latkowski, LM Luc Augustin, Weiming Yao, Andre Richter, Rui Santos, Jeroen Bolk, Twan Korthorst, P. J. A. Thijs, Steven Kleijn, Sergei F. Mingaleev, Huub Ambrosius

Publikováno v: IEEE Journal of Selected Topics in Quantum Electronics, 24(1):7961202, 1-10. Institute of Electrical and Electronics Engineers

The standardization of photonic integration processes for InP has led to versatile and easily accessible generic integration platforms. The generic integration platforms enable the realization of a broad range of applications and lead to a dramatic c

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7a35d5ce64ee9bc42c1640e430c47d0a
http://www.scopus.com/inward/record.url?scp=85022042002&partnerID=8YFLogxK

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Low loss InP membrane photonic integrated circuits enabled by 193-nm deep UV lithography

Autor: Yuqing Jiao, Sander Reniers, Kevin A. Williams, Jorn P. van Engelen, Jos J. G. M. van der Tol, Jeroen Bolk

Publikováno v: 2019 Compound Semiconductor Week, CSW 2019-Proceedings

For the first time we demonstrate the application of 193 nm optical lithography to InP-Membrane-on-Silicon (IMOS) passive nanophotonic integrated circuits. A record low propagation loss of $1. 3\pm 0.1\mathbf{dB}/\mathbf{cm}$ is demonstrated in a Mac

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::499462eaa2d3d362ccdbb66237bd0898
http://www.scopus.com/inward/record.url?scp=85071671069&partnerID=8YFLogxK

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Ultra-low loss arrayed waveguide grating using deep UV lithography on a generic InP photonic integration platform

Autor: Rutger Voets, LM Luc Augustin, Huub Ambrosius, Patty Stabile, Sylwester Latkowski, Jeroen Bolk, D. D'Agostino, Kevin A. Williams, E Elton Bitincka, Didier Marsan, P. DasMahapatra

Publikováno v: 43rd European Conference on Optical Communication, ECOC 2017, 1-3
STARTPAGE=1;ENDPAGE=3;TITLE=43rd European Conference on Optical Communication, ECOC 2017
ISSUE=43;STARTPAGE=1;ENDPAGE=3;TITLE=43rd European Conference on Optical Communications (ECOC 2017)
ECOC

ArF deep UV (193 nm) lithography was successfully applied to fabricate Arrayed Waveguide Gratings in generic Indium Phosphide technology. The sub-dB transmission losses demonstrate the advantages of scaling down the minimum feature size to 100 nm.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3f7e21e5d116a0ef6acb67b598c5eef2
https://research.tue.nl/nl/publications/e7e5bff8-170a-4c29-8cf5-a0239a42bf09

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Wavelength switching speed in semiconductor ring lasers with on-chip filtered optical feedback

Autor: Jan Danckaert, Guy Verschaffelt, Xaveer Leijtens, Romain Modeste Nguimdo, Mulham Khoder, Jeroen Bolk

Publikováno v: IEEE Photonics Technology Letters, 26(5), 520-523. Institute of Electrical and Electronics Engineers

We experimentally and numerically characterize the wavelength switching speed of a tunable semiconductor ring laser using filtered optical feedback. The feedback is realized employing two arrayed-waveguide gratings to split/recombine light into diffe

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7f15c8fd68ac23c6c09492cbaac432bb
https://doi.org/10.1109/LPT.2013.2296398

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Monolithically integrated all-optical regenerator for constant envelope WDM signals

Autor: Stefano Faralli, Giampiero Contestabile, Xaveer Leijtens, Nicola Andriolli, Jeroen Bolk

Publikováno v: Journal of Lightwave Technology, 31(2), 322-327. IEEE/LEOS

All-optical regeneration has attracted growing interest due to the possibility to increase the all-optical reach. However, to be really competitive with optoelectronic regenerators, all-optical regenerators should process an entire wavelength divisio

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::416bf152803de72e89d9775d5efd7122
https://doi.org/10.1109/jlt.2012.2230151

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Monolithic Nanosecond-Reconfigurable 4$\,\times\,$4 Space and Wavelength Selective Cross-Connect

Autor: A. Rohit, Jeroen Bolk, Xaveer Leijtens, Kevin A. Williams

Publikováno v: Journal of Lightwave Technology, 30(17), 2913-2921. IEEE/LEOS

A monolithic InGaAsP/InP 4 × 4 cross-connect is designed, fabricated and demonstrated. Each of the four inputs fan out to two stages of semiconductor optical amplifier-based gates to perform broadband-input-selection and wavelength-specific-selectio

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a6bf21296d599b4761972b9cb08f9ae8
https://doi.org/10.1109/jlt.2012.2208939

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Semiconductor Ring Laser With On-Chip Filtered Optical Feedback for Discrete Wavelength Tuning

Autor: B. Docter, IV Ermakov, Jeroen Bolk, M. Ashour, Jan Danckaert, Guy Verschaffelt, Xaveer Leijtens, Stefano Beri

Publikováno v: IEEE Journal of Quantum Electronics, 48(2), 129-136. Institute of Electrical and Electronics Engineers

We introduce a novel concept of discretely tunable semiconductor lasers with on-chip filtered optical feedback. The integrated device is based on a semiconductor ring laser that can sustain two counter-propagating modes. By means of a directional cou

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::375addf2155af6a70694f7913d0d59d7
https://doi.org/10.1109/jqe.2011.2169945

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