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pro vyhledávání: '"Jeremiah J. Weaver"'
Autor:
James S. Speck, Robert M. Farrell, Steven P. DenBaars, Shuji Nakamura, Jeremiah J. Weaver, Po Shan Hsu, Kenji Fujito
Publikováno v:
IEEE Photonics Technology Letters. 25:2105-2107
We compare facet morphology, device characteristics, and far field patterns (FFPs) for semipolar (1122) laser diodes fabricated with mechanically polished and dry etched mirror facets. Facets formed by Cl2-based dry etching produced inclined and heav