Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Jeongin Yoon"'
Publikováno v:
Water, Vol 15, Iss 20, p 3555 (2023)
Allocating adequate water supplies under the increasing frequency and severity of droughts is a challenge. This study develops an optimal reservoir system operation method to allocate water supplies from upstream reservoirs to meet the downstream wat
Externí odkaz:
https://doaj.org/article/309760ad7ff34be7b4cab215cf555339
Publikováno v:
SPIE Proceedings.
With the introduction of ArF laser, its high photon energy affects the pellicle degradation in direct. The components outgassed from the damaged pellicle have the effect on the CD variation of reticle. In order to resolve this new inevitable problem,
Publikováno v:
25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014); 2014, p321-325, 5p