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pro vyhledávání: '"Jeong Yun Ya"'
Autor:
Jeong Yun Ya, Sang-Mun Chon, Myungsun Kim, Kim Boo Deuk, Min-Ho Jung, Hong Lee, Young-Ho Kim, Don Winning, Do Young Kim, Young-Hoon Kim, Beom-Sang Yoo, Sangwoong Yoon, Eun-Soon Chung
Publikováno v:
SPIE Proceedings.
There are many considerations to the design of BARC materials. Among those many properties, one important property that can effect lithographic performance is BARC coating uniformity. In general, the basic coating property (conformal or planar) depen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::78a007130fae671a33e556be4f395c9d
https://doi.org/10.1117/12.533924
https://doi.org/10.1117/12.533924
