Zobrazeno 1 - 10
of 22
pro vyhledávání: '"Jeong Nam Han"'
Autor:
Si-Young Choi, Ki-hyung Ko, Bo-Un Yoon, Myung-Geun Song, Ho-Kyu Kang, Chil-gi Lee, Jeong-Nam Han, Ha-Young Jeon, Taesung Kim
Publikováno v:
ECS Transactions. 58:57-61
In this paper, problems that can occur during the poly-Si wet etch in the semiconductor process are used and methods to solve these problems are introduced. In order to prevent the substrate from being damaged, we generally use a wet etching process
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::02e1402415b1ca66efd2fe988fdb7f3f
https://doi.org/10.1149/05806.0057ecst
https://doi.org/10.1149/05806.0057ecst
Autor:
Davoud Zamani, Jun Yan, Bert Vermeire, Farhang Shadman, Omid Mahdavi, Jeong-Nam Han, Kedar Dhane
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 24:125-133
Surface cleaning of patterned wafers by batch processing has become a challenge as semiconductor fabrication moves deeper into submicron technology nodes and utilizes larger wafer sizes. Many fabrication plants (fabs) have already employed single waf
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d4273e652d71ded0f87daf3cb0ed0e17
https://doi.org/10.1109/tsm.2010.2089542
https://doi.org/10.1109/tsm.2010.2089542
Autor:
Jung-min Oh, Jeong Nam Han, Chang-ki Hong, Kun Tack Lee, Joo Tae Moon, Woo-Sung Han, Jin-Goo Park
Publikováno v:
Solid State Phenomena. :151-154
The present work reports a method to prevent the condensation defects on contact hole patterns by improving the rinsing process after a dry etching. In general, residual gases on the surface after the dry etching can be easily removed by using a DI w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::67d1ea282d16e50a7ddf2a54c74f7ce9
https://doi.org/10.4028/www.scientific.net/ssp.145-146.151
https://doi.org/10.4028/www.scientific.net/ssp.145-146.151
Autor:
Chang-ki Hong, Jeong Nam Han, Kun Tack Lee, Joo Tae Moon, Sang-Yong Kim, Han-Ku Cho, Im Soo Park, Ji Hoon Cha, Mong Sup Lee
Publikováno v:
Solid State Phenomena. 134:75-78
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3655f1ce7f1ec8bcae6c2ca2a8c58912
https://doi.org/10.4028/www.scientific.net/ssp.134.75
https://doi.org/10.4028/www.scientific.net/ssp.134.75
Publikováno v:
International Journal of Hydrogen Energy. 28:609-613
A new evaluation method of anode/cathode used for polymer electrolyte membrane fuel cell (PEMFC) was developed by using membrane/electrode assembly combined with a gold wire. The gold wire was centered in the polymer electrolyte by the concurrent pre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::203d22c830af8b48fd7e8167fb1770c9
https://doi.org/10.1016/s0360-3199(02)00145-3
https://doi.org/10.1016/s0360-3199(02)00145-3
Publikováno v:
Journal of Electroanalytical Chemistry. 514:118-122
The surface change of a Pd electrode developed by plastic deformation due to the phase transformation of α-PdH to β-PdH has been characterised by fractal geometry. The β-PdH phase formed in the matrix electrode of α-PdH phase causes the plastic d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c178fcde711cbc8617949463baad6a1b
https://doi.org/10.1016/s0022-0728(01)00629-5
https://doi.org/10.1016/s0022-0728(01)00629-5
Autor:
Su-Il Pyun, Jeong-Nam Han
Publikováno v:
Journal of Solid State Electrochemistry. 5:466-472
This paper contributes to the kinetics of hydrogen transport through the Pd foil electrode in 0.1 mol l–1 NaOH solution during the hydrogen extraction from the foil electrode under the self-discharge and potentiostatic conditions by the analysis of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::51c03f3824e5fe42617d7fe5aa1d2c99
https://doi.org/10.1007/s100080100197
https://doi.org/10.1007/s100080100197
Publikováno v:
Journal of Solid State Electrochemistry. 5:459-465
The transport of alkaline cation and neutral species through the α-Ni(OH)2/γ-NiOOH film electrode has been investigated during the hydrogen extraction from and injection into the film electrode in 0.1 M LiOH, KOH and CsOH solutions by using the ele
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b5a78ce2ecfbeafc8a99e612437e88e6
https://doi.org/10.1007/s100080100198
https://doi.org/10.1007/s100080100198
Publikováno v:
Journal of Electroanalytical Chemistry. 506:1-10
In the present work, the stresses generated during cyclic voltammetric measurements on a Pd foil electrode in 0.1 M NaOH solution have been analysed by using a laser beam deflection technique combined with cyclic voltammetry. From the linear relation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1a4be2557c9e6a835b9e043e96c8827d
https://doi.org/10.1016/s0022-0728(01)00481-8
https://doi.org/10.1016/s0022-0728(01)00481-8
Publikováno v:
Journal of Electroanalytical Chemistry. 499:152-160
Anodic current and beam deflection transients were measured simultaneously on a Pd foil electrode pre-charged with hydrogen at −0.02 and 0.09 V(RHE) in 0.1 M NaOH solution as a function of the hydrogen discharging potential. From the analysis of th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::41f92469cbc1737ec6ec4f09e21dfef1
https://doi.org/10.1016/s0022-0728(00)00506-4
https://doi.org/10.1016/s0022-0728(00)00506-4