Zobrazeno 1 - 2
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pro vyhledávání: '"Jeon Yun-Kwang"'
Publikováno v:
In Sensors & Actuators: A. Physical 2003 108(1):20-27
Autor:
Gyeong-Jin Min, Joo Tae Moon, Chul Shin, Han-Ku Cho, Ken Tokashiki, Jeon Yun-Kwang, Chang Jin Kang, Jin-Seok Lee, Do-young Kam, Yvette Lee, Do-Haing Lee, Sung-Wook Hwang
Publikováno v:
Surface and Coatings Technology. 201:8601-8605
Neutralization process efficiency in a low-angle forward-reflected neutral beam source has been observed. Its charging properties have also been compared against those of a conventional plasma processing tool. Neutralization efficiency, defined as th