Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Jens-Peter Zoellner"'
Autor:
Ivo W. Rangelow, Jens-Peter Zoellner, Ahmad Ahmad, Mervyn Jones, Manuel Hofer, Marcus Kaestner, Elshad Guliyev, Tzvetan Ivanov, Zahid A. K. Durrani
As present CMOS devices approach technological and physical limits at the sub-10 nm scale, a ‘beyond CMOS’ information-processing technology is necessary for timescales beyond the semiconductor technology roadmap. This requires new approaches to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9476439da4c653bc4b61ae6dacbe1a36
Autor:
Tzvetan Ivanov, Andreas Schuh, Nataliya Vorbringer-Doroshovets, F. Balzer, Marcus Kaestner, Elshad Guliyev, Ivo W. Rangelow, Eberhard Manske, Manuel Hofer, Ahmad Ahmad, Jens-Peter Zoellner, Roland Fuessl
High Performance Single Nanometer Lithography (SNL) is an enabling technology for beyond CMOS and future nanoelectronics. To keep on with scaling down nanoelectronic components, novel instrumentation for nanometer precise placement, overlay alignment
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6adc61d8e64b1d940b8e7acb80f63bbc
Autor:
Ivo W. Rangelow, Tzvetan Ivanov, Steve Lenk, Marcus Kaestner, Tihomir Angelov, Andreas Schuh, N. Nikolov, Manuel Hofer, Mathias Holz, Matthias Budden, Alexander Reum, Ahmad Ahmad, Yana Krivoshapkina, Elshad Guliyev, Jens-Peter Zoellner
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 32:06F101
Scanning probes have enabled modern nanoscience and are still the backbone of today's nanotechnology. Within the technological development of AFM systems, the cantilever evolved from a simple passive deflection element to a complex microelectromechan
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::54bf23dd52c9c3601e4369dbddd41a08
https://doi.org/10.1116/1.4897500
https://doi.org/10.1116/1.4897500
