Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jens Staecker"'
Autor:
Thomas Theeuwes, Michael Kubis, Daan Slotboom, Young-Wan Lim, Kyu-Tae Sun, Sungki Park, Emil Schmitt-Weaver, Jens Staecker, Honggoo Lee, Min-Suk Kim, Won-Taik Kwon, Sangjun Han, Kevin Ryan, Myoung-Soo Kim
Publikováno v:
SPIE Proceedings.
While semiconductor manufacturing moves toward the 7nm node for logic and 15nm node for memory, an increased emphasis has been placed on reducing the influence known contributors have toward the on product overlay budget. With a machine learning tech
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d2141aac6a260fc40c54755c189ba52f
https://doi.org/10.1117/12.2085475
https://doi.org/10.1117/12.2085475
Autor:
Richard Johannes Franciscus Van Haren, Remi Daniel Marie Edart, Hoite Pieter Theodoor Tolsma, Maurits van der Schaar, Stefanie Arendt, Karl Schumacher, Jens Staecker, Evert Mos, Wolfgang Demmerle
Publikováno v:
SPIE Proceedings.
Overlay budgets are getting tighter within 300 mm volume production and as a consequence the process effects on alignment and off-line metrology becomes more important. In a short loop experiment, with cleared reference marks in each image field, the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::506f3eda561b8e0c25cccba733958167
https://doi.org/10.1117/12.473421
https://doi.org/10.1117/12.473421