Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Jens Busch"'
Autor:
Jens Busch, Chin Teong Lim, Matthias Ruhm, Norman Chen, Andre Leschok, Frank Richter, Huifeng Koh, Karin Kurth, Paul Ackmann, Guoxiang Ning
Publikováno v:
SPIE Proceedings.
Assuming that all exposure tools on which a certain production reticle is being used are from same type and configuration it can be expected that the performance of the reticle should be independent from the exposing machines. When planning or perfor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f4b20dc98e1049443e14d7818d6cf4c3
https://doi.org/10.1117/12.2011504
https://doi.org/10.1117/12.2011504
Publikováno v:
27th European Mask and Lithography Conference.
Chip manufacturing with multilayer reticles offers the possibility to reduce reticle cost at the expense of scanner throughput, and is therefore an attractive option for small-volume production and test chips. Since 2010, GLOBALFOUNDRIES Fab 1 uses t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e63e9bf441792b71d1370b0fb4c4c160
https://doi.org/10.1117/12.885690
https://doi.org/10.1117/12.885690
Autor:
Andre Holfeld, Jens Busch, Rolf Seltmann, Francois Weisbuch, Gert Burbach, Anne Parge, Andre Poock, Tino Hertzsch
Publikováno v:
25th European Mask and Lithography Conference.
Within our paper we are going to discuss the variation within the patterning process in the context of the overall electrical parameter variation in an advanced logic Fab. The evaluation is based on both the variation of ring oscillators that are dis
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::98c308cb9a16f4687c0a18629e52b6e2
https://doi.org/10.1117/12.835166
https://doi.org/10.1117/12.835166
Publikováno v:
SPIE Proceedings.
As a consequence of the shrinking sizes of the integrated circuit structures, the overlay budget shrinks as well. Overlay is traditionally measured with relatively large test structures which are located in the scribe line of the exposure field, in t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5fb4ad16571574a9f9bdce4f71fc3718
https://doi.org/10.1117/12.708471
https://doi.org/10.1117/12.708471
Autor:
Jens Busch, Rolf Seltmann, Bernd Schulz, Elyakim Kassel, Philippe Leray, Michael E. Adel, Aviv Frommer, Pavel Izikson
Publikováno v:
SPIE Proceedings.
In this publication, the contributors to in-field overlay metrology uncertainty have been parsed and quantified on a back end process and compared with results from a previous front end study 1 . Particular focus is placed on the unmodeled systematic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c1857774bcd3f3e67c185bb7f3e0a5e
https://doi.org/10.1117/12.656467
https://doi.org/10.1117/12.656467
Autor:
Wolfgang Banzhaf, Jens Busch
Publikováno v:
Advances in Artificial Life ISBN: 9783540200574
ECAL
ECAL
Using the framework of artificial chemistries (ACs) an automated theorem prover (ATP) is constructed. Though it is an application of its own, in the context of ACs automated theorem proving can serve a second purpose. In this paper, we present a reso
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9b8498c8d4724ad3d80060411e3c943c
https://doi.org/10.1007/978-3-540-39432-7_3
https://doi.org/10.1007/978-3-540-39432-7_3
Publikováno v:
Lecture Notes in Computer Science ISBN: 9783540433781
EuroGP
EuroGP
We present the system SIGEL that combines the simulation and visualization of robots with a Genetic Programming system for the automated evolution of walking. It is designed to automatically generate control programs for arbitrary robots without depe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c5d1fa953afda3c495da8e6bf98c1ad4
https://doi.org/10.1007/3-540-45984-7_25
https://doi.org/10.1007/3-540-45984-7_25