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pro vyhledávání: '"Jenny Goulden"'
Versatile, high-sensitivity, multi-spectroscopy instruments for biological sample studies in the NIR
Publikováno v:
Frontiers in Biophotonics and Imaging II.
Publikováno v:
Photonic Instrumentation Engineering IX.
Autor:
David Ockwell, Lawrence Mudarikwa, Jenny Goulden, Lei Feng, Andrew D. L. Humphris, Matthew Tedaldi
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIV.
The Rapid Probe Microscope (RPM), exists as an integrated solution for photomask repair, with its application extended to include wafer metrology in 2016 [1]. The RPM can acquire non-destructive, high resolution, sub-nm detail in all 3 dimensions, ov
Autor:
Anne-Laure Charley, Jenny Goulden, Elis Newham, Christopher Bevis, Lei Feng, Mircea Dusa, Alain Moussa, Andrew D. L. Humphris
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIV.
Atomic Force Microscopy (AFM) is a proven technique applied in research environments, most commonly in materials science and biological research. More recently, requirements in semiconductor manufacturing advocate that probe microscopy has potential