Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Jeng-Nan Hung"'
Autor:
Jeng-Nan Hung, 洪政男
92
Devices of Micro-electro-mechanical System (MEMS) include microactuators, microsensors and their transducers. Where, the microactuators drives the whole system and enables the system to operate effectively. This thesis uses polysilicon as the
Devices of Micro-electro-mechanical System (MEMS) include microactuators, microsensors and their transducers. Where, the microactuators drives the whole system and enables the system to operate effectively. This thesis uses polysilicon as the
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/59482337235612062478
Publikováno v:
Japanese Journal of Applied Physics. 47:5256-5261
With the vast potential of micro-electro-mechanical systems (MEMS) technology, the reliability is essential for the successful applications of microdevices. Polycrystalline silicon is one of the most often used structural materials in microdevices. T
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6accdbab65cf3d3341bc99aa04e6560e
https://doi.org/10.1143/jjap.47.5256
https://doi.org/10.1143/jjap.47.5256
Autor:
Jeng-Nan Hung, Hong Hocheng
Publikováno v:
2007 Digest of papers Microprocesses and Nanotechnology.
In this study, the polysilicon microcantilever beams are successfully fabricated and fully suspended. The results of fatigue life in bending are obtained by both microactuator testing method, MTS testing machine and piezoelectric system. The experime
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::779d25b12090e9a1c45579a5e95d1b32
https://doi.org/10.1109/imnc.2007.4456251
https://doi.org/10.1109/imnc.2007.4456251
Publikováno v:
Volume 3.
Micro thermal-electrostatic actuator devices are widely used in MEMS. However, the effect of structure sizes on deformation and fatigue is seldom discussed. In this work, the effect of structure sizes on deformation and fatigue is investigated. In th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::759095e2d1fdb4fae91f42a64ce13ac4
https://doi.org/10.1115/esda2004-58263
https://doi.org/10.1115/esda2004-58263
Autor:
Jeng-Nan Hung, Hong Hocheng
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 11:021206-1
Microcantilever beams have been widely used in micro- electromechanical systems (MEMS) devices. Their reliability is an essential factor for a successful MEMS product in an industrial setting. This study discusses the fatigue life of polysilicon micr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::352e4dc4df7f0214efd0f9dd4c835cbc
https://doi.org/10.1117/1.jmm.11.2.021206
https://doi.org/10.1117/1.jmm.11.2.021206
Publikováno v:
Japanese Journal of Applied Physics. 50:06GM07
In the rapid advancement of micro/nano-electro-mechanical systems (MEMS/NEMS) technology, however, the reliable applications lie in the characterization of the mechanical fatigue properties of the micro/nano-structures. This paper presents the fatigu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0b1635a5d9a407bb472edd240cb941f3
https://doi.org/10.7567/jjap.50.06gm07
https://doi.org/10.7567/jjap.50.06gm07
Autor:
Hong Hocheng, Jeng-Nan Hung
Publikováno v:
2007 Digest of papers Microprocesses & Nanotechnology; 2007, p356-357, 2p