Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Jen-Jiang Lee"'
Autor:
Yung-Sheng Lin, Tsung-Cheng Chen, Jung-Ching Wang, Chen Shian-Wen, Chen-Hao Ku, Jui-Yi Hung, Ching-Chang Wen, Jen-Jiang Lee
Publikováno v:
2014 IEEE 40th Photovoltaic Specialist Conference (PVSC).
AlO x provides excellent passivation on p-type silicon surface and has successfully implemented to high efficiency Passvated Emitter and Rear Cell (PERC) solar cells in recent years. Generally, AlO x is deposited by using plasma enhanced chemical vap
Autor:
David W. Gidley, Jim Connor, E. Todd Ryan, Todd Guenther, Lynne Svedberg, Melissa Freeman, Jianing Sun, Katie Yu, Jen-Jiang Lee
Publikováno v:
MRS Proceedings. 766
The compatibility of ALD and CVD metal deposition with mesoporous and microporous carbon-doped organosilicate glass (OSG) films was examined. Blanket film studies using TEM, TOF-SIMS, and positron lifetime spectroscopy demonstrate that ALD Wand TaN p
Autor:
Scott Daniel Hector, S. Dakshina-Murthy, Will Conley, Wei Wu, Jen-Jiang Lee, Todd Guenther, Tom Lii, Jonathan L. Cobb, F. Huang, Saifi Usmani, Colita Parker
Publikováno v:
SPIE Proceedings.
Extreme ultraviolet lithography (EUVL), and possibly 157-nm lithography, will require thin imaging layers (< 1500 A). Theleading EUV resist strategy utilizes thin resists based on materials designed for 248 nm wavelength exposure and hardmasks.This p
Autor:
Jen Jiang Lee, Gerald G. Fuller
Publikováno v:
Macromolecules. 17:375-380
Publikováno v:
Journal of The Electrochemical Society. 135:711-714
Autor:
Gerald G. Fuller, Jen-Jiang Lee
Publikováno v:
Journal of Colloid and Interface Science. 107:308-313
In this paper the bead and spring model of a polymer chain adsorbed onto a solid boundary in the presence of flow is extended to include the effects of hydrodynamic interactions between the polymer segments and the solid surface. In addition, the con
Autor:
Gerald G. Fuller, Jen-Jiang Lee
Publikováno v:
Journal of Colloid and Interface Science. 103:569-577
Ellipsometry has been applied to the study of adsorption and desorption of flexible polymer chains in flowing systems. This optical technique produces a measurement of both film thickness and adsorbance under velocity gradients up to 7800 sec −1 .
Publikováno v:
Journal of The Electrochemical Society. 135:2111-2113
X-ray fluorescence (XRF) has received a great deal of attention in the last few years as a quantitative means of determining both the stoichiometry and thickness of many different kinds of films. Examples include Ag and Cu films on mica substrates, S
Autor:
GERALD G. FULLER, JEN-JIANG LEE
Publikováno v:
ACS Symposium Series ISBN: 9780841208209
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c930e5892191980c80171beb70309fe4
https://doi.org/10.1021/bk-1984-0240.ch005
https://doi.org/10.1021/bk-1984-0240.ch005
Publikováno v:
Advances in Resist Technology and Processing VI.
Fourier transform infrared (FUR) spectroscopy was used to study the effects of various resist process variables on the photospeed. Resist components which are responsible for photospeed changes were identified. The doublet peak around 2100 cm -1 , wh