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pro vyhledávání: '"Jeffrey Florczak"'
Publikováno v:
SPIE Proceedings.
Over the years there have been demonstrations of various methods capable of forming sub-micron features such as photo, electron beam, and imprint lithography. Generally these methods are limited to planar master tools of limited dimensional size. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ddf9b5b3cdb517c14a58965fd55a16b5
https://doi.org/10.1117/12.809492
https://doi.org/10.1117/12.809492
