Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jeffery T. Wetzel"'
Publikováno v:
Journal of Applied Physics. 92:808-811
An evanescent microwave probe (EMP) has been used to characterize low-k dielectric films grown on Si wafers at 2 GHz. Several families of low-k dielectric films with varying film thicknesses have been examined. The EMP signal (shift in resonant frequ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f60e2616657c578a90256010f17747e8
https://doi.org/10.1063/1.1481199
https://doi.org/10.1063/1.1481199
Autor:
Ken Sotodeh, David Wang, Yukio Nishimura, Frank L. Palmieri, Gerard M. Schmid, Jeffery T. Wetzel, Jianjun Hao, Eui Kyoon Kim, Michael D. Dickey, Stephen C. Johnson, Douglas J. Resnick, Ecron Thompson, Kane Jen, Richard M. Laine, Carlton G Willson, Michael D. Stewart
Publikováno v:
SPIE Proceedings.
Advanced microprocessors require several (eight or more) levels of wiring to carry signal and power from transistor to transistor and to the outside world. Each wiring level must make connection to the levels above and below it through via/contact la
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1818ad05bc6fcc0a851c06dbf7c85595
https://doi.org/10.1117/12.599977
https://doi.org/10.1117/12.599977