EUV Mechanistic Studies of Antimony Resists

Autor: Robert L. Brainard, Greg Denbeaux, Philip Schuler, Jacob Sitterly, Michael C. Murphy, Jeff Richards, Amrit Narasimhan, Steven Grzeskowiak

Publikováno v: Journal of Photopolymer Science and Technology. 30:121-131

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::da615f249442a0143ef6b52fcd195270
https://doi.org/10.2494/photopolymer.30.121

Antimony photoresists for EUV lithography: mechanistic studies

Autor: Michael C. Murphy, Jeff Richards, Amrit Narasimhan, Robert L. Brainard, Philip Schuler, Jacob Sitterly, Steven Grzeskowiak, Greg Denbeaux

Publikováno v: SPIE Proceedings.

We have developed a method to study the photomechanism of our antimony carboxylate platform R3Sb(COOR')2. A series of mechanistic studies followed the production of reaction byproducts by mass spectrometer, as they left the film during exposure to EU

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6eb92857137c963dadb1495fbc28aa79
https://doi.org/10.1117/12.2258119

List of Contributors

Autor: Ana P.L. Abdala, David H. Adams, Marlies Alvarenga, Amy C. Arnold, Felicia B. Axelrod, Franca Barbic, Peter J. Barnes, Deborah Bauer, Christopher Bell, Eduardo E. Benarroch, Elizabeth M. Berry-Kravis, Luciano Bernardi, Italo Biaggioni, Lori Birder, Virginia L. Brooks, Joan Heller Brown, Geoffrey Burnstock, Michael Camilleri, J.Preston Campbell, Robert M. Carey, Marc G. Caron, Calvin Carter, Priscila A. Cassaglia, Javier G. Castillo, Mark W. Chapleau, Nisha Charkoudian, P. David Charles, Gisela Chelimsky, Thomas Chelimsky, Pei-Wen Cheng, Gilles Clément, Pietro Cortelli, Allen W. Cowley, Leslie Crews, Stephen N. Davis, Thomas L. Davis, William C. de Groat, Vincent G. DeMarco, André Diedrich, Donald J. DiPette, Debra I. Diz, Marcus J. Drake, Rachel C. Drew, Matthias Dütsch, Graeme Eisenhofer, Florent Elefteriou, Fernando Elijovich, Brett A. English, Murray Esler, John Y. Fang, Robert D. Fealey, Stanley Fernandez, Gregory D. Fink, John S. Floras, Roy Freeman, Qi Fu, Liang-Wu Fu, Raffaello Furlan, Alfredo Gamboa, Emily M. Garland, Christopher H. Gibbons, Michael P. Gilbey, Janice L. Gilden, Sid Gilman, David S. Goldstein, Diego A. Golombek, Robert M. Graham, Guido Grassi, Mark D. Grier, Jan T. Groothuis, Blair P. Grubb, Maureen K. Hahn, Julian P.J. Halcox, Robert W. Hamill, Kenneth R. Hande, Yadollah Harati, David G. Harrison, Emma C. Hart, Jacqui Hastings, Luke A. Henderson, Max J. Hilz, Robert Hoeldtke, Shung Tai Ho, Peter Hunter, Keith Hyland, Lauren Hyland, Shahram Izadyar, Joseph L. Izzo, Edwin K. Jackson, Giris Jacob, Wilfrid Jänig, Megan S. Johnson, Carrie K. Jones, James F.X. Jones, Karen M. Joos, Jens Jordan, Michael J. Joyner, Stephen G. Kaler, Sergey Kasparov, Horacio Kaufmann, David Kaye, Ramesh K. Khurana, Chun-Hyung Kim, Kwang-Soo Kim, Kazuto Kobayashi, Nancy L. Kuntz, Tomas Konecny, Andrew Kontak, Cheryl L. Laffer, Andre H. Lagrange, Nora Laiken, Gavin Lambert, Jacques W.M. Lenders, Benjamin D. Levine, Lewis A. Lipsitz, Julian H. Lombard, John C. Longhurst, David A. Low, Phillip A. Low, Chih Cherng Lu, James M. Luther, Vaughan G. Macefield, Belinda H. McCully, James G. McLeod, William M. Manger, Tadaaki Mano, Paul J. Marvar, Eliezer Masliah, Christopher J. Mathias, Mark R. Melson, Douglas F. Milam, Marion C. Mohl, Yaroslav I. Molkov, Margaret Morris, Shaun F. Morrison, Toshiharu Nagatsu, Charles D. Nichols, Lucy Norcliffe-Kaufmann, Vera Novak, Luis E. Okamoto, John W. Osborn, Brian A. Parsons, Julian F.R. Paton, Pallavi P. Patwari, Cecile L. Phan, Fenna T. Phibbs, Nanduri R. Prabhakar, Amanda C. Peltier, Sean M. Peterson, Anthony E Pickering, J.Howard Pratt, Kamal Rahmouni, Satish R. Raj, Casey M. Rand, Heinz Reichmann, Jeff Richards, L.Jackson Roberts, David W. Robertson, Rose Marie Robertson, Michael Robinson, Ilya A. Rybak, Elaine Sanders-Bush, Paola Sandroni, Kyoko Sato, Takayuki Sato, Irwin J. Schatz, Ernesto L. Schiffrin, Ronald Schondorf, Rosemary Schwarz, Gino Seravalle, Robert E. Shapiro, Cyndya Shibao, Virend Somers, Michaela Stampfer, C.Michael Stein, Sylvia Stemberger, Julian Stewart, Lawrence I. Sinoway, James R. Sowers, Sirisha Srikakarlapudi, Kenji Sunagawa, Scott C. Supowit, Palmer Taylor, Jane Thompson, Roland D. Thijs, Rhian M Touyz, Daniel Tranel, Subbulaxmi Trikudanathan, Ching-Jiunn Tseng, Che-Se Tung, Kiren Ubhi, Nikhil Urs, Joseph G. Verbalis, Steven Vernino, Ronald G. Victor, Margaret A. Vizzard, Wanpen Vongpatanasin, B.Gunnar Wallin, Tobias Wang, Qin Wang, Andrew A. Webster, Debra E. Weese-Mayer, Gregor K. Wenning, Adam Whaley-Connell, Wouter Wieling, Gordon H. Williams, Scott Wood, Michael G. Ziegler, Daniel B. Zoccal

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::339751ee66d6eee5a7316633f4b04b2f
https://doi.org/10.1016/b978-0-12-386525-0.00149-9

Micro-States: A Specific Form of Polity?

Autor: Jeff Richards

Publikováno v: Politics. 10:40-46

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::fbefd5b0dc37917c98dbba7dbf69ffb1
https://doi.org/10.1111/j.1467-9256.1990.tb00176.x

Panic Disorder

Autor: Murray Esler, Gavin Lambert, Jane Thompson, David Kaye, Jacqui Hastings, Rosemary Schwarz, Marlies Alvarenga, Jeff Richards, Margaret Morris

Publisher Summary There may be a precipitating cause of panic—such as being in a confining space (as in claustrophobia) or in public places (as in agoraphobia)—but in many cases, the occurrence of panic attacks is unexpected. Recurring attacks ov

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6c4ae821d94a69a44aab8855236fda58
https://doi.org/10.1016/b978-012589762-4/50107-9