Micromachined microphones with diffraction-based optical displacement detection.

Autor: Hall, Neal A., Bicen, Baris, Jeelani, M. Kamran, Wook Lee, Qureshi, Shakeel, Degertekin, F. Levent, Okandan, Murat

Publikováno v: Journal of the Acoustical Society of America; Nov2005, Vol. 118 Issue 5, p3000-3009, 10p, 7 Diagrams, 1 Chart, 5 Graphs